Precision Humidity Control in Semiconductor Clean Room

Jabil Greenpoint, a leading semiconductor manufacturer, faced significant challenges in maintaining precise humidity levels within their cleanroom environment. Cleanrooms in semiconductor manufacturing demand stringent control of environmental parameters to ensure defect-free chip production. Even minor fluctuations in humidity can cause condensation, corrosion, and process inconsistencies, directly impacting yield and product quality.

The project aimed to achieve stable cleanroom conditions of 22°C temperature with 40% Relative Humidity (RH). However, the existing chilled water system was insufficient to meet these requirements, resulting in moisture content levels higher than the desired threshold of 45.9 grs/lb.

Challenges Faced

• Insufficient Chilled Water Load: The chilled water system struggled to remove enough moisture from the air, especially during peak operational hours.
• High Moisture Content: The off-coil conditions from the Makeup Air Unit (MAU) resulted in moisture levels of 79.9 grs/lb, far exceeding the optimal range.
• Condensation Risks: The inability to control humidity effectively posed a risk of condensation on sensitive wafer surfaces.
• Impact on Process Efficiency: Fluctuating humidity levels affected vacuum pump performance and compromised the efficiency of key equipment.

Results Achieved

• Stable Cleanroom Conditions: The dehumidifier successfully maintained 22°C at 40% RH.
• Improved Process Consistency: The risk of condensation was eliminated, leading to fewer defects.
• Enhanced Equipment Efficiency: Reduced moisture levels improved vacuum pump efficiency and lowered costs.
• Optimized Energy Use: Reduced reliance on the chilled water system, improving overall energy efficiency.

Key Takeaways

• Precision humidity control is critical in semiconductor manufacturing to maintain product quality.
• Desiccant dehumidifiers offer a reliable solution when chilled water systems are insufficient.
• Bry-Air’s advanced solutions optimize environmental conditions and equipment performance.