The growing concern and need for air and gas purification in a semiconductor industry, is not only for keeping electronic equipments safe from corrosive and toxic gases, but also from the need for manufacturers to insure the safety of working personnel and the community surrounding the facility. Contaminants such as silane, arsine, phosphine, diborane, hydrogen chloride, nitric acid, sulphuric acid, lead sulphonic acid, ammonia, propanol, and in some cases, cyanide compounds, are chemically active and are present in high concentrations in production areas in semiconductor industry, and must, therefore, be carefully controlled, so, that there are no dangerous emissions and air contamination.
Problems faced in manufacturing process due to Air contamination :
Effects of Contaminant Gases in manufacturing area :
Effects of Ammonia;
Effects of Boron , Ozone and other volatile organic compounds :
Three types of solutions are available for corrosion control and elimination of air contaminants, depending on the size of the room and location of the gas emission areas inside the manufacturing rooms. They are as follows:
Air suction hoods to be placed at contaminant emission areas, which in turn connect via air ducts to a powered air scrubber, placed either inside or outside the protected room (in re-circulation mode).
Bry-Air EcoScrub gas phase filtration solution is ideal for human and hardware health. It removes contaminants and eliminates downtime by removing corrosive gases through the process of adsorption and chemisorptions. Contaminated air passes through pre-filters which retain dust and particles. The chemical media stages (combination of activated carbon and activated alumina impregnated with proprietary chemicals) then chemically destroy remaining gaseous contaminants. Bry-Air EcoScrub is designed to maintain the ISA standard 71.04, IEC standard and Environmental Standards followed by electronics manufacturers.